n.微切削加工

A Micromachining Based Miniature Variable Optical Attenuator[J]. 引用該論文 萬鵬

Micromachining Based Direct-Coupled Variable Optical Attenuator[J]. 引用該論文 晏輝鳴

A novel MEMS inertia micro-switch has been designed basing on non-silicon surface micromachining technology. 基于非硅表面微加工技術(shù),設(shè)計(jì)了一種新的MEMS微型慣性電學(xué)開關(guān)。

The concepts of micromachining and Multi-Chip-Module (MCM) integrated from DC to RF components will be explained also. 文中將涉及微加工技術(shù)以及從直流至射頻的多芯片全集成新概念。

Using surface micromachining, the sector plates are fabricated to verify the theoretical analysis. 利用面型微細(xì)加工制程，扇行平板結(jié)構(gòu)被制造出來用以驗(yàn)證理論分析。