n.雙壓電晶片(雙晶)
A new type of the PZT driving device to realize the planar movement by using the bimorph oscillator as the driver was presented. 摘要采用雙壓電晶片振子為移動(dòng)機(jī)構(gòu)的驅(qū)動(dòng)源，提出可以實(shí)現(xiàn)二維平面移動(dòng)的新型壓電驅(qū)動(dòng)機(jī)構(gòu)。
雙語素的
