n.三維輪廓儀

In order to minimize the measurement error,the contact surface contourgraph is designed based on vertical displacement scan. 為減小測量誤差,設(shè)計了基于垂直位移掃描的接觸式表面形貌儀。

Keywords ?Contourgraph;Measuring system;Computer appliation; 輪廓儀;測量系統(tǒng);計算機應(yīng)用;

Keywords Surface contourgraph Diffraction grating Linear motor Piezoelectric ceramic; 表面輪廓儀;衍射光柵;直線電機;壓電陶瓷;