
n.三維輪廓儀
In order to minimize the measurement error,the contact surface contourgraph is designed based on vertical displacement scan. 為減小測(cè)量誤差,設(shè)計(jì)了基于垂直位移掃描的接觸式表面形貌儀。
Keywords ?Contourgraph;Measuring system;Computer appliation; 輪廓儀;測(cè)量系統(tǒng);計(jì)算機(jī)應(yīng)用;
Keywords Surface contourgraph Diffraction grating Linear motor Piezoelectric ceramic; 表面輪廓儀;衍射光柵;直線電機(jī);壓電陶瓷;